Web7_high_order.pdf Description: This section contains information on context and direction, big and slow - high-order overdamped systems, the FODT approximation to high-order step response, dead time is delay, dead time and lag are different. WebIn this paper, we evaluated the High Order Process Correction (HOPC), Correction Per Exposure (CPE), High Order Wafer Alignment (HOWA) and High order intra-field Process …
Overlay control goes to high-order Semiconductor Digest
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